Home > Products > Flow Sensors > FS4003 MEMS Mass Flow Sensor
FS4003 MEMS Mass Flow Sensor
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Product Details
Brand Name: | Siargo | Place of Origin: | United States | Model Number: | FS4003 |
Usage: | Other, Air Flow Sensor |
Product Description
FS4003 Gas Mass Flow Sensor description
FS4003 mass flow sensors are designed for general purpose flow monitor and control applications, and are made with Siargo's world leading proprietary MEMS mass flow sensors and the smart electronic control system. The sensors directly measure mass flow in the designed channel with a low pressure loss. These sensors can readily be applied for electronics flow meters for anesthesia equipments, clean room air flow or nitrogen flush monitor and control, environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer.
FS4003 has a flow channel diameter of 3 mm. This sensors have a very low pressure loss while it can measure air flow up to 5 SLPM. Applications include leakage detection, particle counter, and analytical instrumentation.
FS4003 Gas Mass Flow Sensor Features and Applications
- Designed for 3 and 8 mm package
- Mass flow detectable from 0 ~ 2 SLPM to 0 ~ 50 SLPM
- Exchangeable connectors for easy installation
- Digital and analog output provide easy access for various communications
- Compact design ready for multiple channel assembly
- Excellent for electronic meters in anesthesia equipment
- Fast response and low power consumption
- Low pressure loss
FS4003 Gas Mass Flow Sensor Specifications
Model | FS4003 | unit |
Flow Range | 0 ~ 2, 3, 4, 5 | SLPM |
Turn-down Ratio | >100:1 | |
Accuracy | ±(1.5 + 0.2 FS) | % |
Repeatability | ± 0.25 | %Reading |
Null Shift | ± 30 | mV |
Output Shift | ± 0.12 | %/°C |
Response Time | 10 (Default, 50, 100, 200, 500, 1000 selectable) | ms |
Output | Linear: Analog 0.5 ~ 4.5 Vdc / Diaital RS232 or RS458 | |
Pressure Drop (Max.) | <100 | Pa |
Max. Working Pressure | 0.5 | MPa |
Power Supply | 8 ~ 24 Vdc, 50 mA | |
Operating Current | 16 typical when RS232/RS458 not connected | mA |
18 typical when RS232/RS458 communicates with a PC | ||
Power Consumption | <220 | mW |
Analog Output Load | Sourcing: 14 | mA |
Sinking: 11 | ||
Working Temperature | -5 ~ +55 | °C |
FS4003 Gas Mass Flow Sensor Product Selection
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